A comparison of As and P-based semiconductors grown at low temperatures by MBE and GSMBE

Author:

Maracas G. N.,Shiralagi K.,Ramamurti R.,Carpenter R. W.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference38 articles.

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4. S. Tehrani, A.D. van Rheenen, M. Hoogstra, J.A. Curless and M.S. Peffley,IEEE Trans. Electron Dev. 39, 1070 (1992).

5. A.S. Brown, C.S. Chou, M.J. Delaney, C.E. Hooper, L.E. Larson, M.A. Melendez, U.K. Mishra, M. Thompson and S.E. Rosenbaum,GaAs IC Symp. Digest (1990) (IOP Publishing, NY).

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1. Three-dimensional carrier concentration profiles and ionization energy plots for low-temperature GaAs;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2001

2. Deep levels in low temperature GaAs probed by field effect deep level transient spectroscopy;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1999

3. Deep trap in InGaAs grown by gas source molecular beam epitaxy;Journal of Applied Physics;1999-01

4. Evaluation of plasma and thermal sources for atomic hydrogen-assisted epitaxy of InP;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1998-03

5. Structural and electrical properties of low-temperature-grown Al(As,Sb);Applied Physics Letters;1997-12-15

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