Evaluation of plasma and thermal sources for atomic hydrogen-assisted epitaxy of InP
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Published:1998-03
Issue:2
Volume:16
Page:590-594
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
LaPierre R. R.,Thompson D. A.,Robinson B. J.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics