Author:
B�uerle D.,Leyendecker G.,Wagner D.,Bauser E.,Lu Y. C.
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science
Reference10 articles.
1. For a review see e.g.: D. Bäuerle: InLaser Diagnostics and and Photochemical Processing for Semiconductor Devices, ed. by R.M. Osgood and S.R.J. Brueck. (North-Holland, New York 1983)
2. G. Leyendecker, D. Bäuerle, P. Geittner, H. Lydtin: Appl. Phys. Lett.39, 921 (1981)
3. D. Bäuerle, P. Irsigler, G. Leyendecker, H. Noll, D. Wagner: Appl. Phys. Lett.40, 819 (1982)
4. G. Leyendecker, H. Noll, D. Bäuerle, P. Geittner, H. Lydtin: J. Electrochem. Soc.130, 157 (1983)
5. W. Kräuter, D. Bäuerle, F. Fimberger: To be published
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