1. M Hanabata, Y Uetani and A Furuta,J. Vac. Sci. Technol., Vol. B7, pp. 640–650, 1989.
2. G M Wallraff and W D Hinsberg,Chem. Rev., Vol. 99, pp. 1801–1822, 1999.
3. G Baehr, U Westerwelle and G Gruetzner,Proc. SPIE-Int. Soc. Opt. Eng., Vol. 3049, pp. 628–638, 1997.
4. M A Khadim, M D Rahman and D L Durham,Proc. SPIE-Int. Soc. Opt. Eng., Vol. 1672, pp. 347–359, 1992.
5. Microlithography Science and Technology, Edited by James R Sheats, Bruce W Smith, Maecel Dekker Inc., 1998.