Chemical vapour-deposited silicon nitride-Reference-Cited by-同舟云学术

Chemical vapour-deposited silicon nitride

Published:1977-06 Issue:6 Volume:12 Page:1233-1242
ISSN:0022-2461
Container-title:Journal of Materials Science
language:en
Short-container-title:J Mater Sci

Author:

Niihara Koichi,Hirai Toshio

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/BF02426862.pdf

Reference40 articles.

1. A. F. McLean,Bull. Amer. Ceram. Soc. 52 (1973) 464, 482.

2. R. A. Alliegro andS. H. Coes, American Society of Mechanical Engineers Paper 72-GT-20, March 1972.

3. B. F. Jones andM. W. Lindley,J. Mater. Sci. 10 (1975) 967.

4. G. G. Deeley, J. M. Herbert andN. C. Moore,Powder Met. 8 (1961) 145.

5. R. F. Coe, R. J. Lumby andM. F. Pawson, “Special Ceramics 5”, edited by P. Popper (British Ceramic Research Association, Stoke-on-Trent, 1968) p. 361.

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