Mechanical and Tribological Properties of NbTiAlx, NbTiAl0.5Ny, and NbTiAl0.5N14-CHz Coatings with Various Aluminum Target Currents and Nitrogen and Acetylene Flow Rates-Reference-Cited by-同舟云学术

Mechanical and Tribological Properties of NbTiAlx, NbTiAl0.5Ny, and NbTiAl0.5N14-CHz Coatings with Various Aluminum Target Currents and Nitrogen and Acetylene Flow Rates

Published:2022-11-28 Issue: Volume: Page:
ISSN:1059-9495
Container-title:Journal of Materials Engineering and Performance
language:en
Short-container-title:J. of Materi Eng and Perform

Author:

Su Y. L.,Kao W. H.,Chen B. Y.

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://link.springer.com/content/pdf/10.1007/s11665-022-07681-9.pdf

Reference48 articles.

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3. Y.G. Li, H. Yuan, Z.T. Jiang, N. Pan, and M.K. Lei, Phase Composition and Mechanical Properties of Homostructure NbN Nanocomposite Coatings Deposited by Modulated Pulsed Power Magnetron Sputtering, Surf. Coat. Technol., 2020, 385, p 125387.

4. N. Cansever, M. Danışman, and K. Kazmanlı, The Effect of Nitrogen Pressure on Cathodic Arc Deposited NbN Thin Films, Surf. Coat. Technol., 2008, 202, p 5919–5923.

5. C.S. Sandu, M. Benkahoul, M.P. Wojtan, R. Sanjinés, and F. Lévy, Morphological, Structural and Mechanical Properties of NbN Thin Films Deposited by Reactive Magnetron Sputtering, Surf. Coat. Technol., 2006, 200, p 6544–6548.

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