Conversion Efficiency Calculations for Soft X-Rays Emitted from Tin Plasma for Lithography Applications
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Publisher
Springer Netherlands
Link
http://link.springer.com/content/pdf/10.1007/978-1-4020-9924-3_32.pdf
Reference10 articles.
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3. Yamaura, M. et al.: ‘Characterization of extreme ultraviolet emission using the fourth harmonic of a Nd:YAG laser’, App. Phys. Lett., 86, 181107–181110, 2005
4. Cummings. A. et al.: ‘Conversion efficiency of a laser-produced Sn plasma at 13.5 nm, simulated with a one-dimensional hydrodynamic model and treated as a multi-component blackbody’, J. Phys. D: Appl. Phys., 38, 604–616, 2005
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