Radio frequency glow discharge source with integrated voltage and current probes used for sputtering rate and emission yield measurements at insulating samples-Reference-Cited by-同舟云学术

Radio frequency glow discharge source with integrated voltage and current probes used for sputtering rate and emission yield measurements at insulating samples

Published:2005-06-11 Issue:3 Volume:383 Page:424-433
ISSN:1618-2642
Container-title:Analytical and Bioanalytical Chemistry
language:en
Short-container-title:Anal Bioanal Chem

Author:

Wilken L.,Hoffmann V.,Wetzig K.

Publisher

Springer Science and Business Media LLC

Subject

Biochemistry,Analytical Chemistry

Link

http://link.springer.com/content/pdf/10.1007/s00216-005-3246-9.pdf

Reference27 articles.

1. Payling R, Jones D, Bengtson A (1997) Glow discharge optical emission spectrometry. Wiley, New York

2. Bengtson A (1994) Spectrochim Acta Part B 49:411–429

3. Marshall KA, Casper TJ, Brushwyler KR, Mitchell JC (2003) J Anal Atom Spectrom 18:637–645

4. Anfone AB, Marcus RK (2001) J Anal Atom Spectrom 16:506–513

5. Fernandez B, Bordel N, Pereiro R, Sanz-Medel A (2004) Anal Chem 76:1039–1044

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