Author:
Singh C.,Ganguly P.,Das S.,Kal S.,Lahiri S. K.
Publisher
Springer Science and Business Media LLC
Subject
Atomic and Molecular Physics, and Optics
Reference9 articles.
1. G.T.A. Kovacs, N.I. Maluf, and K.E. Peterson, “Bulk Micromachining of Silicon”, Proceedings of the IEEE, 86, pp. 1536–1551, 1998.
2. M. Elwenspoek and H. Jansen, “Silicon Micromachining”, Cambridge University Press, 1998.
3. F. Maseeh and S. D. Senturia, “Plastic deformation of highly doped silicon”, Sensors Actuators, A21–A23, pp. 861-865, 1990.
4. Changyx P-Z and Yang L-J, “A method using V-grooves to monitor the thickness of silicon membrane with µm resolution”, J. Micromech. Macron., 8 pp. 182–187, 1998.
5. Manual on Scanning Electron Microscopy (JSM-5800), JEOL, Japan, 1999.
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献