Modeling and experiments of a nano-positioning and high frequency scanning piezoelectric platform based on function module actuator
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Engineering,General Materials Science
Link
https://link.springer.com/content/pdf/10.1007/s11431-020-1676-7.pdf
Reference38 articles.
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3. Lee C, Salapaka S M. Model based control of dynamic atomic force microscope. Rev Sci Instrum, 2015, 86: 043703
4. Li L L, Li C X, Gu G, et al. Modified repetitive control based cross-coupling compensation approach for the piezoelectric tube scanner of atomic force microscopes. IEEE/ASME Trans Mechatron, 2019, 24: 666–676
5. Salim M, Salim D, Chandran D, et al. Review of nano piezoelectric devices in biomedicine applications. J Intel Mat Syst Str, 2018, 29: 2105–2121
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