Mold deformation in soft UV-nanoimprint lithography
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Publisher
Springer Science and Business Media LLC
Link
http://link.springer.com/content/pdf/10.1007/s11431-008-0199-1.pdf
Reference13 articles.
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3. Bender M, Fuchs A, Plachetka U, et al. Status and prospect of UV-nanoimprint technology. Microelectron Eng, 2006, 83: 827–830
4. Lazzarino F, Gourgon C, Schiavone P, et al. Mold deformation in nanoimprint lithography. J Vac Sci Technol B, 2004, 22(6): 3318–3321
5. Rolland J P, Hagberg E C, Denison G M, et al. High-resolution soft lithography: enabling material for nanotechnologies. Angew Chem Int Ed, 2004, 43: 5796–5799
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