Design and implementation of an active rectangular aerostatic thrust bearing stage with electromagnetic actuators
Author:
Publisher
Elsevier BV
Subject
Multidisciplinary
Link
http://link.springer.com/content/pdf/10.1007/s11434-008-0554-4
Reference12 articles.
1. Stout K J, Barrans S M. The design of aerostatic bearings for application to nanometer resolution manufacturing machine systems. Trib Inter, 2000, 33(12): 803-809
2. Kwan P Y-B, Post B J. A tolerancing procedure for inherently compensated, rectangular aerostatic thrust bearings. Trib Inter, 2000, 33(8): 581–585
3. Slocum A, Basaran M, Cortesi R, et al. Linear motion carriage with aerostatic bearings preloaded by inclined iron core linear electric motor. Precis Eng, 2003, 27(4): 382–394
4. Shinno H, Hashizume H, Yoshioka H, et al. X-Y-θ nano-positioning table system for a mother machine. CIRP, 2004, 53(1): 337–340
5. Peijnenburg A T A, Vermeulen J P M, Eijk van J. Magnetic levitation systems compared to conventional bearing systems. Micro Eng, 2006, 83(4–9): 1372–1375
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1. Aerostatic Thrust Bearing Combining Silicone Restrictor with Flexible Disk under Circumferential Support for High Static Stiffness;Tribology Transactions;2016-07-06
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