Magnetic levitation systems compared to conventional bearing systems-Reference-Cited by-同舟云学术

Magnetic levitation systems compared to conventional bearing systems

Published:2006-04 Issue:4-9 Volume:83 Page:1372-1375
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Peijnenburg A.T.A.,Vermeulen J.P.M.,van Eijk J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference1 articles.

1. A.C.P. de Klerk, G.Z. Angelis, J. van Eijk, Design of a next generation 6-DoF stage for scanning applications in vacuum with nanometer accuracy and mGauss magnetic stray field, in: Proceedings of the 19th ASPE Annual Meeting, Orlando, FL, October 24–29, 2004, pp. 60–63.

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