Ion-energy distributions in liquid-metal-ion sources-Reference-Cited by-同舟云学术

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Ion-energy distributions in liquid-metal-ion sources

Published:1987-11 Issue:3 Volume:44 Page:233-238
ISSN:0721-7250
Container-title:Applied Physics A Solids and Surfaces
language:en
Short-container-title:Appl. Phys. A

Author:

Ishitani T.,Kawanami Y.,Ohnishi T.,Umemura K.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/BF00616695.pdf

Reference21 articles.

1. R.L. Seliger, R.L. Kubena, V. Wang: Proc. 13th Conf. Solid State Devices, Tokyo 1981; Jpn. J. Appl. Phys. Suppl.21?1, 3 (1982)

2. R.H. Reuss: Nucl. Instrum. Methods B10/11, 515 (1985)

3. R. Gomer: Appl. Phys.19, 365 (1979)

4. S. Shukuri, Y. Wada, M. Tamura, K. Umemura, T. Ishitani:17th Symp. on Ion Implantation and Submicron Fabrication (The Institute of Physical and Chemical Research, 1986) p. 189

5. K.D. Cummings, L.R. Harriott, G.C. Chi, F.W. Ostermayer, Jr.: SPIE632, 93 (1986)

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