Quantitative Analysis of (Y2O3)x (ZrO2)1-x Films on Silicon by EPMA-Reference-Cited by-同舟云学术

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Quantitative Analysis of (Y2O3)x (ZrO2)1-x Films on Silicon by EPMA

Published:1992 Issue: Volume: Page:213-219
ISSN:0076-8642
Container-title:Mikrochimica Acta
language:
Short-container-title:

Author:

Ammann Norbert,Lubig Andreas,Karduck Peter

Publisher

Springer Vienna

Link

http://link.springer.com/content/pdf/10.1007/978-3-7091-6679-6_22.pdf

Reference12 articles.

1. H. Fukumoto, T. Imura, Y. Osaka, Jpn. J. Appl. Phys. 1988,27, L1404.

2. J. L. Pouchou, F. Pichoir, Rech. Aerosp. 1984,5,47.

3. H. J. Hunger, W. Baumann, S. Schulze, Cryst. Res. Tech. 1985,20, 1427.

4. P. Willich, D. Obertop, Surf. Interface Anal. 1988, 13,20.

5. G. F. Bastin, H. J. M. Heijligers, J. M. Dijkstra, Microbeam Analysis 1990 (J. R. Michael, P. Ingram, eds.), San Francisco Press, San Francisco, 1990, p. 159.

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. EPMA Sputter Depth Profiling, Part I: Theory and Evaluation;Modern Developments and Applications in Microbeam Analysis;1998

2. Quantitative Near-Surface Microanalysis and Depth Profiling by EPMA;Modern Developments and Applications in Microbeam Analysis;1998

3. Direct writing of gold and copper lines from solutions;Applied Surface Science;1996-10

4. Investigation of implanted gallium depth distributions in ZnSxSe-x by EPMA;Mikrochimica Acta;1994-12

5. Quantitative depth profile analysis by EPMA combined with Monte-Carlo simulation;Surface and Interface Analysis;1994-07

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