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Effects of etching conditions on surface morphology of periodic inverted trapezoidal patterned Si(100) substrate

  • Published:2017-01 Issue:1 Volume:13 Page:45-49
  • ISSN:1673-1905
  • Container-title:Optoelectronics Letters
  • language:en
  • Short-container-title:Optoelectron. Lett.

Author:

Zhang Lu,Yuan Guo-dong,Wang Qi,Wang Ke-chao,Wu Rui-wei,Liu Zhi-qiang,Li Jin-min,Wang Jun-xi

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Ki-Wha Jun, Byung-Min Kim and Jung-Sik Kim, Micro & Nano Letters 10, 487 (2015).

2. D. Zhu, D. J. Wallis and C. J. Humphreys, Reports on Progress in Physics 76, 1 (2013).

3. Tong Yu-ying, Yang Guo-feng, Zhao Jian-li, Zhang Qing and Wang Jin, Journal of Optoelectronics·Laser 26, 829 (2015). (in Chinese)

4. Wang Xiao-wei, Zhong Shao-long, Xu Jing and Wu Yaming, Journal of Optoelectronics·Laser 26, 829 (2015). (in Chinese)

5. Sun Qian, Yan Wei, Feng Mei-xin, Li Zeng-cheng, Feng Bo, Zhao Han-min and Yang Hui, Journal of Semiconductors 37, 044006-1 (2016).

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