Model-based vibration control for optical lenses

Author:

Störkle Johannes,Eberhard PeterORCID

Abstract

AbstractThis work presents a contribution to the active image stabilization of optical systems, involving model development, control design, and the hardware setup. A laboratory experiment is built, which demonstrates the vibration sensitivity of a mechanical-optical system. In order to stabilize the undesired image motion actively, a model-based compensation of the image vibration is developed, realized and tested. Beside a linear actuator motion system, a force sensor system and a position sensor system are introduced and analyzed. In particular, various low-cost hardware components of the Arduino platform are used, which support the deployment of the controller software based on Matlab-Simulink. The remaining image motion is measured with a high-speed vision sensor system and the performance of the overall system is assessed.

Publisher

Springer Science and Business Media LLC

Subject

Control and Optimization,Computer Science Applications,Mechanical Engineering,Aerospace Engineering,Modeling and Simulation

Reference32 articles.

1. Butler, H.: Position control in lithographic equipment, applications of control. IEEE Control Syst. 31(5), 28–47 (2011)

2. Wengert, N., Eberhard, P.: Vibration modification in an opto-dynamical test setup for suppressing aberrations. In: Proceedings of the 11th ICOVP, Lisbon, Portugal (2013)

3. Seifried, R.: Dynamics of Underactuated Multibody Systems – Modeling, Control and Optimal Design. Springer, Berlin (2014)

4. Wengert, N., Nefzi, M., Eberhard, P., Geuppert, B.: Dynamics in lithographic projection objectives. Multibody Syst. Dyn. 30(2), 233–245 (2013)

5. Barber, R., Horra, M., Crespo, J.: Control practices using simulink with Arduino as low cost hardware. In: IFAC Proceedings Volumes, vol. 46, pp. 250–255 (2013)

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