Dynamics in lithographic projection objectives-Reference-Cited by-同舟云学术

Dynamics in lithographic projection objectives

Published:2013-02-02 Issue:2 Volume:30 Page:233-245
ISSN:1384-5640
Container-title:Multibody System Dynamics
language:en
Short-container-title:Multibody Syst Dyn

Author:

Wengert Nicolai,Nefzi Marwène,Eberhard Peter,Geuppert Bernhard

Publisher

Springer Science and Business Media LLC

Subject

Control and Optimization,Computer Science Applications,Mechanical Engineering,Aerospace Engineering,Modeling and Simulation

Link

http://link.springer.com/content/pdf/10.1007/s11044-013-9344-0.pdf

Reference10 articles.

1. Gilbergs, H., Wengert, N., Frenner, K., Eberhard, P., Osten, W.: Reconstruction of dynamical perturbations in optical systems by opto-mechanical simulation methods. In: Proc. of SPIE, vol. 8326 (2012)

2. Gross, H. (ed.): Handbook of Optical Systems—Fundamentals of Technical Optics. Wiley, Weinheim (2005)

3. Meschede, D.: Optik, Licht und Laser. Vieweg Teubner, Wiesbaden (2008) (in German)

4. Piersol, A., Paez, T.: Harris’ Shock and Vibration Handbook, 6th edn. McGraw-Hill, New York (2009)

5. Rastogi, P. (ed.): Photomechanics. Springer, Berlin (2000)

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