Ultra-precision 3 DOF tilting stage for workpiece setup of scalable micro-pattern machining
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Published:2017-08
Issue:8
Volume:18
Page:1103-1109
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ISSN:2234-7593
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Container-title:International Journal of Precision Engineering and Manufacturing
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language:en
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Short-container-title:Int. J. Precis. Eng. Manuf.
Author:
Kim Jong-Su,Youn Hongseok,Kang Bongchul
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering
Reference37 articles.
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