Fibre laser microvia drilling and ablation of Si with tuneable pulse shapes

Author:

Li Kun,O’Neill William

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering

Reference38 articles.

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3. Jaafar, M. A. S. and Denton, D. D., “A Plated Through-Hole Interconnect Technology in Silicon,” Journal of the Electrochemical Society, Vol. 144, No. 7, pp. 2490–2495, 1997.

4. NanoMarkets, “Materials for Thin-Film Silicon Photovoltaics,” www.nanomarkets.net

5. Otani, T., Herbst, L., Heglin, M., Govorkov, S. V. and Wiessner, A. O., “Microdrilling and micromachining with diode-pumped solid-state lasers,” Applied Physics A: Materials Science & Processing, Vol. 79, No. 4–6, pp. 1335–1339, 2004.

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