Pulse energy packing effects on material transport during laser processing of $$<1|1|1>$$ < 1 | 1 | 1 > silicon
Author:
Funder
Technology Strategy Board
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Link
http://link.springer.com/article/10.1007/s00339-017-1415-2/fulltext.html
Reference36 articles.
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3. D. Breitling, H. Schittenhelm, P. Berger, F. Dausinger, H. Hügel, Shadowgraphic and interferometric investigations on Nd: YAG laser-induced vapor/plasma plumes for different processing wavelengths. Appl. Phys. A Mater. Sci. Process. 69(7), S505–S508 (1999)
4. A.V. Bulgakov, N.M. Bulgakova, Dynamics of laser-induced plume expansion into an ambient gas during film deposition. Phys. D Appl. Phys. 28(8), 1710–1718 (1995)
5. A. Bogaerts, Z. Chen, Effect of laser parameters on laser ablation and laser-induced plasma formation: a numerical modeling investigation. Spectrochim. Acta Part B At. Spectrosc. 60(9–10), 1280–1307 (2005)
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