Generation of diamond wire sliced wafer surface based on the distribution of diamond grits

Author:

Chung Chunhui,Nhat Le Van

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering

Reference20 articles.

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2. Goldstein, M. and Watanabe, M., “450mm Silicon Wafers Challenges-Wafer Thickness Scaling,” ECS Transactions, Vol. 16, No. 6, pp. 3–13, 2008.

3. Tso, P. L. and Yan, B. H., “A Study of Slicing Process with Thin Diamond Wire (Frinding Technology),” Proc. of International Conference on Leading Edgy Manufacturing in 21st Century: LEM 21, Vol. 2, pp. 619–624, 2005.

4. Sugawara, J., Yamakawa, M., and Mizoguchi, A., “Development of Fixed-Abrasive Grain Wire Saw,” SEI Technical Review, No. 52, pp. 87–90, 2001.

5. Pauli, Pl., Beesley, J. G., Schonholzer, U. P., and Kerat, U., “Swiss Wafer Slicing Technology for the Global PV Market from Meyer+ Burger AG-Novel Trends for the Future in Photovolatic Wafer Manufacturing,” Proc. of 6th Symposium Photovoltaique National SIG Geneve, 2005.

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