Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering
Reference17 articles.
1. Oiwa, T., Katsuki, M., Karita, M., Gao, W., Makinouchi, S., et al., “Questionnaire Survey on Ultra-Precision Positioning,” Int. J. of Automation Technology, Vol. 5, No. 6, pp. 766–772, 2011.
2. Tomita, Y., Makino, K., Sugimine, M., and Taniguchi, N., “High-Response XY Stage System Driven by in-Parallel Linear Motors,” CIRP Annals-Manufacturing Technology, Vol. 45, No. 1, pp. 359–362, 1996.
3. Kim, K., Choi, Y. M., Nam, B. U., and Lee, M. G., “Dual Servo Stage without Mechanical Coupling for Process of Manufacture and Inspection of Flat Panel Displays Via Modular Design Approach,” Int. J. Precis. Eng. Manuf., Vol. 13, No. 3, pp. 407–412, 2012.
4. Makinouchi, S., “The History of Exposure-tool Stages for the Semiconductor Manufacturing,” Proc. of ICPT, pp. 7–8, 2012.
5. Park, C. H., Song, C. K., Hwang, J., and Kim, B. S., “Development of an Ultra Precision Machine Tool for Micromachining on Large Surfaces,” Int. J. Precis. Eng. Manuf., Vol. 10, No. 4, pp. 85–91, 2009.
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