Author:
Liu Peng-Bo,Yan Peng,Zhang Zhen,Leng Tong-Tong
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering
Reference29 articles.
1. Tien, S., Zou, Q., and Devasia, S., “Iterative Control of Dynamics-Coupling-Caused Errors in Piezoscanners during High-Speed AFM Operation,” IEEE Transactions on Control Systems Technology, Vol. 13, No. 6, pp. 921–931, 2005.
2. Shinno, H., Yoshioka, H., and Taniguchi, K., “A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining,” CIRP Annals-Manufacturing Technology, Vol. 56, No. 1, pp. 369–372, 2007.
3. Abramovitch, D. and Franklin, G., “A Brief History of Disk Drive Control,” IEEE Control Systems, Vol. 22, No. 3, pp. 28–42, 2002.
4. Gu, G.-Y., Zhu, L.-M., Su, C.-Y., and Ding, H., “Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation,” IEEE/ASME Transactions on Mechatronics, Vol. 18, No. 5, pp. 1459–1471, 2013.
5. Liu, P., Yan, P., and Zhang, Z., “Design and Analysis of an X-Y Parallel Nanopositioner Supporting Large-Stroke Servomechanism,” Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, Vol. 229, No. 2, pp. 364–376, 2014.
Cited by
19 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献