Theoretical and experimental analysis of material deformation by microcontact
-
Published:2009-04
Issue:2
Volume:10
Page:111-116
-
ISSN:1229-8557
-
Container-title:International Journal of Precision Engineering and Manufacturing
-
language:en
-
Short-container-title:Int. J. Precis. Eng. Manuf.
Author:
Ryu Rae-Hyeong,Lim Si-Hyung,Jeong Jay I.,Shin Donghoon,Jang Siyoul,Yim Hong Jae,Lee Kee Sung
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering
Reference17 articles.
1. Lan, H., Ding, Y., Liu, H. and Lu, B., “Review of the water stage for nanoimprint lithography,” Microelectronic Engineering, Vol. 84, No. 4, pp. 684–688, 2007. 2. Hsueh, C., Lee, S., Lin, H., Chen, L. and Wang, W., “Analyses of mechanical failure in nanoimprint processes,” Materials Science and Engineering A, Vol. 433, No. 1–2, pp. 316–322, 2006. 3. Chou, S. Y., Krauss, P. R. and Renstrom, P. J., “Imprint lithography with 25 nanometer resolution,” Science, Vol. 272, No. 5258, pp. 85–87, 1996. 4. Schueller, O. J. A., Brittain, S. T. and Whitesides, G. M., “Fabrication of glassy carbon microstructures by soft lithography,” Sensors and Actuators A: Physical, Vol. 72, No. 2, pp. 125–139, 1999. 5. Choi, B. J., Sreenivasan, S. V., Johnson, S., Colburn, M. and Wilson, C. G., “Design of orientation stages for step and flash imprint lithography,” Journal of the International Societies for Precision Engineering and Nanotechnology, Vol. 25, No. 3, pp. 192–199, 2001.
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Characterizations of the interfacial energy in glass/resin laminates;International Journal of Precision Engineering and Manufacturing;2011-12 2. Roughness damage evolution due to wire saw process;International Journal of Precision Engineering and Manufacturing;2011-12 3. Micropatterning on roll surface using photo-lithography processes;International Journal of Precision Engineering and Manufacturing;2011-10 4. Fracture Behavior of Glass/Resin/Glass Sandwich Structures with Different Resin Thicknesses;Transactions of the Korean Society of Mechanical Engineers A;2010-12-01
|
|