Author:
Kim Jong-Ahn,Kim Jae Wan,Kang Chu-Shik,Eom Tae Bong
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering
Reference13 articles.
1. Teague, E. C., “Nanometrology,” Proc. AIP Conference on Scanned Probe Microscopy, Vol. 241, pp. 371–407, 1991.
2. Carneiro, K., “The need for metrology in nanotechnology,” Danish Institute of Fundamental Metrology, pp. 1–5, 2001.
3. Meli, F. and Thalmann, R., “Long-range AFM profiler used for accurate pitch measurements,” Measurement Science and Technology, Vol. 9, No. 7, pp. 1087–1092, 1998.
4. Schneir, J., McWaid, T. H., Alexander, J. and Wilfley, B. P., “Design of an Atomic Force Microscope with Interferometric Position Control,” Journal of Vacuum Science Technology B, Vol. 12, No. 6, pp. 3561–3566, 1994.
5. Hasche, K., Herrmann, K., Mirande, W., Seemann, R., Vitushkin, L., Xu, M. and Yu, G., “Calibrated Scanning Force Microscope with Capabilities in the Subnanometre Range,” Surface and Interface Analysis, Vol. 33, No. 2, pp. 71–74, 2002.
Cited by
16 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献