Author:
Joo Woo-Deok,Park Jiyong,Kim Seungman,Kim Seungchul,Kim Yunseok,Kim Seung-Woo,Kim Young-Jin
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering
Reference30 articles.
1. Wyant, J. C., “Interferometric optical metrology: basic system and principles,” Laser Focus, pp. 65–71, 1981.
2. North-Morris, M. B., Van Delden, J., and Wyant, J. C., “Phaseshifting birefringent scatterplate interferometer,” Appl. Opt., Vol. 41, pp. 668–677, 2002.
3. Caber, P. J., “Interferometric profiler for rough surfaces,” Appl. Opt., Vol. 32, pp. 3438–3441, 1993.
4. Park, J. and Kim, S.-W., “Active autofocus control using source dithering technique based on fibre-optic confocal principle,” Int. J. Precis. Eng. Manuf., Vol. 12, pp. 733–736, 2011.
5. Kihm, H. and Kim, S.-W., “Fiber-diffraction interferometer for vibration desensitization,” Opt. Lett., Vol. 30, pp. 2059–2061, 2005.
Cited by
13 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献