Design and Positioning Control of a Flexure-Based Nano-positioning Stage Driven by Halbach Array Voice Coil Actuator-Reference-Cited by-同舟云学术

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Design and Positioning Control of a Flexure-Based Nano-positioning Stage Driven by Halbach Array Voice Coil Actuator

Published:2022-01-25 Issue:3 Volume:23 Page:281-290
ISSN:2234-7593
Container-title:International Journal of Precision Engineering and Manufacturing
language:en
Short-container-title:Int. J. Precis. Eng. Manuf.

Author:

Zhang Chi^ORCID,Huang Xiaolu,Yang Miao,Chen Si-Lu,Chen Jinhua,Yang Guilin

Funder

National Natural Science Foundation of China

Ningbo Municipal Bureau of Science and Technology

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering

Link

https://link.springer.com/content/pdf/10.1007/s12541-022-00619-0.pdf

Reference28 articles.

1. Maroufi, M., Fowler, A. G., & Moheimani, S. O. R. (2017). Mems for nanopositioning: Design and applications. Journal of Microelectromechanical Systems, 26(3), 469–500. https://doi.org/10.1109/jmems.2017.2687861

2. Jung, J.-K., Youm, W.-S., & Park, K.-H. (2019). Vibration reduction control of a voice coil motor (VCM) nano scanner. International Journal of Precision Engineering and Manufacturing, 10(3), 167–170. https://doi.org/10.1007/s12541-009-0063-7.

3. Teo, T. .J., Yang, G. .L., & Chen, I. .M. (2004). A large deflection and high payload flexure-based parallel manipulator for UV nanoimprint lithography: Part I. Modeling and analyses. Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, 38(4), 861–871. https://doi.org/10.1016/j.precisioneng.2014.05.003.

4. Liu, Y., & Xu, Q. (2015). Design of a flexure-based auto-focusing device for a microscope. International Journal of Precision Engineering and Manufacturing, 16(11), 2271–2279. https://doi.org/10.1007/s12541-015-0292-x

5. Zhang, X., & Xu, Q. (2018). Design and testing of a new 3-DOF spatial flexure parallel micropositioning stage. International Journal of Precision Engineering and Manufacturing, 19(1), 109–118. https://doi.org/10.1007/s12541-018-0013-3.

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Identification and Compensation of the Flexure-Induced Motion Error with a Voice Coil Motor;International Journal of Precision Engineering and Manufacturing;2024-06-29

2. Recent Development of Piezoelectric Fast Tool Servo (FTS) for Precision Machining;International Journal of Precision Engineering and Manufacturing;2023-11-04

3. Design and Feasibility Test of Motorized Hand-Held Devices for Intra-compartmental Pressure Monitoring;International Journal of Precision Engineering and Manufacturing;2023-10-26

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