The use of Focused Ion Beam to Build Nanodevices with Graphitic Structures
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Publisher
Springer Berlin Heidelberg
Link
http://link.springer.com/content/pdf/10.1007/978-3-642-23348-7_21.pdf
Reference28 articles.
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2. Giannuzzi, L. A.: Introduction to focused ion beam – Instrumentation, theory, techniques and pratice Springer, New York (2005).
3. Tseng, A. A.: Recent developments in micromilling using focused ion beam technology. J. Micromech. Microeng. 14, R15–R34 (2004).
4. Reyntjens, S., Puers, R.: A review of focused ion beam applications in microsystem technology. J. Micromech. Microeng. 11, 287–300 (2001).
5. Stokes, D. J., Wilhelmi, O., Reyntjens, S., Jiao, C., Roussel, L.: New methods for the study and fabrication of nano-structured materials using FIB SEM. J. Nanosci. Nanotechnol. 9, 1268-1271 (2009).
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