Author:
Bandorf R.,Pape F.,Gatzen H. H.,Bräuer G.
Publisher
Springer Berlin Heidelberg
Reference30 articles.
1. Bandorf R, Lüthje H, Schiffmann K, Staedler T, Wortmann A (2002) Sub-micron coatings with low friction and wear for micro actuators. Microsystem Technologies 8(1):51–54
2. Bandorf R, Lüthje H, Schiffmann K, Beck M, Gatzen H, Schmidt M, Büttgenbach S, Bräuer G (2004) Sub-micron coatings with low friction and wear for micro actuators. Microsystem Technologies 10(3):223–226
3. Bandorf R, Lüthje H, Staedler T (2004) Influencing factors on microtribology of dlc films for MEMS and microactuators. Diamond and Related Materials 13(4-8):1491–1493
4. Bandorf R, Lüthje H, Henke C, Wiebe J, Sick J, Küster R (2005) Different carbon based thin films and their microtribological behaviour in mems applications. Surface and Coatings Technology 200(56):1777–1782
5. Bandorf R, Luthje H, Kuster R, Sick J (2006) Microtribology: Carbon based coatings on micro structured surfaces. In: Proceedings of the Annual Technical Conference-Society of Vacuum Coaters, vol 49, p 554