Point Autofocus Instruments

Author:

Miura Katsuhiro,Nose Atsuko

Publisher

Springer Berlin Heidelberg

Reference10 articles.

1. Fukatsu, H., Yanagi, K.: Development of an optical stylus displacement sensor for surface profiling instruments. Microsys. Tech. 11, 582–589 (2005)

2. Fukatsu, H.: Development of an optical profiling sensor suppressing outliers and able to deal with inclinations. Research achievement paper (2006)

3. ISO 25178 part 2, Geometrical product specification (GPS) – Surface texture: Areal – Part 2: Terms, definitions and surface texture parameters. International Organization for Standardization (2010)

4. ISO/CD 25178 part 605, Geometrical product specification (GPS) – Surface texture: Areal – Part 605: Nominal characteristics of non-contact (point autofocus probe) instruments. International Organization for Standardization (2011)

5. Leach, R.K.: Fundamental principles of engineering nanometrology. Elsevier, Amsterdam (2009)

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