Author:
de Groot Peter J.,Badami Vivek G.
Publisher
Springer Berlin Heidelberg
Reference21 articles.
1. Badami, V., de Groot, P.: Displacement measuring interferometry. In: Harding, K.G. (ed.) Handbook of Optical Dimensional Metrology, pp. 157–238. Taylor & Francis, Boca Raton (2013)
2. Zanoni, C.: Differential interferometer arrangements for distance and angle measurements: Principles, advantages and applications. VDI-Berichte 749, 93–106 (1989)
3. Sommargren, G.E., Schaham, M.: Heterodyne interferometer system. Patent US 4,688,940 (1987)
4. Steinmetz, C.R.: Displacement measurement repeatability in tens of nanometers with laser interferometry. In: SPIE Proceedings, vol. 921, pp. 406–420 (1988)
5. Sommargren, G.E.: Linear/angular displacement interferometer for wafer stage metrology. In: Optical/Laser Microfithography II, vol. 1088, pp. 268–272 (1989)
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Advances in Optical Metrology;The Optics Encyclopedia;2015-09-20
2. Displacement Measurement;Fundamental Principles of Engineering Nanometrology;2014