Advances in Optical Metrology
Author:
Affiliation:
1. Zygo Corporation; Middlefield Connecticut USA
Publisher
Wiley-VCH Verlag GmbH & Co. KGaA
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/9783527600441.oe065.pub2/fullpdf
Reference70 articles.
1. - Laser Tracking Systems
2. Unusual techniques for absolute distance measurement
3. High-precision fiber-optic position sensing using diode laser radar techniques
4. Partially multiplexing sensor network exploiting low coherence interferometry
5. Front Matter: Volume 7405
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Tested mirror precision alignment system using a pinhole point diffraction interferometer based on machine vision;Journal of the Optical Society of America A;2024-07-05
2. Complex amplitude extraction from a set of interferograms by simultaneous modulation of amplitude and phase steps;Optics Communications;2024-02
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