1. Rai-Choudhury P (ed) (1997) Handbook of Microlithography, Micromachining and Micro-fabrication. SPIE Optical Engineering Press, Bellingham, and IEE, London
2. Campbell SA (1996) The Science and Engineering of Microelectronic Fabrication. Oxford University Press, New York
3. Gardner JW (1994) Microsensors: Principles and Applications. John Wiley & Sons, Chichester
4. Pogge HB (ed) (1996) Electronic Materials Chemistry. Marcel Dekker, New York
5. Kendall DL, Shoultz (1997) Wet chemical etching of silicon and SiO2, and ten challenges for micromachiners. In: Rai-Choudhury P (ed) Handbook of Microlithography, Micromachining, and Microfabrication Vol. 2: Micromachining and Microfabrication. SPIE Optical Engineering Press, Bellingham, and IEE, London, pp 41–97