Steady-state, nonlinear analysis of large arrays of electrically actuated micromembranes vibrating in a fluid
Author:
Publisher
Springer Science and Business Media LLC
Subject
Computer Science Applications,General Engineering,Modeling and Simulation,Software
Link
http://link.springer.com/article/10.1007/s00366-017-0560-8/fulltext.html
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3. Wang X, Fan Y, Tian WC, Kwon HJ, Kennerly S, Claydon G, May A (2007) An air-coupled capacitive micromachined ultrasound transducer for noncontact nondestructive evaluation. In: Sensors, 2007 IEEE, 2007, pp 1464–1467
4. O’Mahony C, Hill M, Duane R, Mathewson A (2003) Analysis of electromechanical boundary effects on the pull-in of micromachined fixed-fixed beams. J Micromech Microeng 13(4):S75
5. Ballandras S, Wilm M, Daniau W, Reinhardt A, Laude V, Armati R (2005) Periodic finite element/boundary element modeling of capacitive micromachined ultrasonic transducers. J Appl Phys 97(3):034901
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