CoSi2 formation in contact systems based on Ti-Co alloy with low cobalt content-Reference-Cited by-同舟云学术

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CoSi2 formation in contact systems based on Ti-Co alloy with low cobalt content

Published:1995-11 Issue:5 Volume:61 Page:565-567
ISSN:0947-8396
Container-title:Applied Physics A Materials Science & Processing
language:en
Short-container-title:Appl. Phys. A

Author:

Gromov D. G.,Mochalov A. I.,Pugachevich V. P.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/BF01540260.pdf

Reference11 articles.

1. K.N. Tu: J. Vac. Sci. Technol.19, 776 (1981)

2. J.O. Olowolafe, K.N. Tu, J. Angilello: J. Appl. Phys.50, 6316 (1979)

3. N.V. Rozhanskii, V.O. Lifshits: Phys. Stat. Sol. (a)125, 237 (1991)

4. S.L. Hsia, T.Y. Tan, P. Smith, G.E. Mcguire: J. Appl. Phys.70, 7579 (1991)

5. J.P.W.B. Duchateau, J.E. Crobeen, E.G.C. Lathouwers, A.H. Reader: Semicond. Sci. Technol.7, 1310 (1992)

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