Bistable Microdevice with Electrothermal Compliant Mechanism
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s42341-021-00345-w.pdf
Reference32 articles.
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3. W. Ai, Q. Xu, Overview of flexure-based compliant microgrippers. Adv Robot Res 1(1), 1–19 (2014)
4. P. Vargas-Chable, M. Tecpoyotl-Torres, R. Cabello-Ruiz, J. A. Rodriguez-Ramirez, R. Vargas-Bernal, Modified U-shaped microactuator with compliant mechanism applied to a microgripper. Actuators 8, 28 (2019). https://doi.org/10.3390/act8010028
5. M. Lara-Castro, A. Herrera-Amaya, M.A. Escarola-Rosas, M. Vázquez-Toledo, F. López-Huerta, L.A. Aguilera-Cortés, A.L. Herrera-May, Design and modeling of polysilicon electrothermal actuators for a MEMS mirror with low power consumption. Micromachines 8(7), 203 (2017)
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