Q Factor Modeling and Material Selection of a Variable Capacitor based on RF-MEMS Technology
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s42341-021-00347-8.pdf
Reference29 articles.
1. M. Angira, D. Bansal, P. Kumar, K. Mehta, K. Rangra, A novel capacitive RF-MEMS switch for multi-frequency operation. Superlattices Microstruct. 133, 106204 (2019)
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3. D.M. Fang, Y. Zhou, X.N. Wang, X.L. Zhao, Surface micromachined high-performance RF MEMS inductors. Microsyst. Technol. 13(1), 79–83 (2007)
4. M. Baghelani, H.B. Ghavifekr, A novel technique for design of ultra high tunable electrostatic parallel plate RF MEMS variable capacitor. Sens. Imag. 18(1), 1–10 (2017)
5. Patra, P., &Angira, M. (2019). Investigation on Dielectric Material Selection for RF-MEMS Shunt Capacitive Switches Using Ashby, TOPSIS and VIKOR. Transactions on Electrical and Electronic Materials, 1–8
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