Surface micromachined high-performance RF MEMS inductors-Reference-Cited by-同舟云学术

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Surface micromachined high-performance RF MEMS inductors

Published:2006-10-06 Issue:1 Volume:13 Page:79-83
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Fang Dong-Ming,Zhou Yong,Wang Xi-Ning,Zhao Xiao-Lin

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-006-0262-4.pdf

Reference19 articles.

1. Soyuer M, Burghartz JN et al (1995) Multilevel monolithic inductors in silicon technology. Electron Lett 31(5):359–360

2. Burghartz JN (1996) Multilevel-spiral inductors using VLSI Interconnect technology. IEEE Electron Device Lett 17(9):428–430

3. Ribas RP, Lescot J, Leclercq JL, Karam JM (2000) Micromachined microwave planar spiral inductors and transformers. IEEE Trans Microwave Theory Tech 48(8):1326–1334

4. Guo L, Yu M, Chen Z, He H, Zhang Y (2002) High Q multilayer spiral inductor on silicon chip for 5∼6 GHz. IEEE Electron Device Lett 23(8):470–472

5. Itoi K, Sato M, Abe H et al (2004) On-chip high-Q solenoid inductors embedded in WL-CSP. Proceedings of HDP, pp 105–108

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