Mass sensing based on nonlinear intermodal coupling via 2:1 internal resonance of electrostatically actuated clamped–clamped microbeams
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Control and Optimization,Mechanical Engineering,Modeling and Simulation,Civil and Structural Engineering,Control and Systems Engineering
Link
https://link.springer.com/content/pdf/10.1007/s40435-023-01355-7.pdf
Reference58 articles.
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3. Kumar P, Pawaskar DN, Inamdar MM (2023) Investigation of a bandpass filter based on nonlinear modal coupling via 2:1 internal resonance of electrostatically actuated clamped-guided microbeams. J Vib Eng Technol 1–14
4. Peng JS, Yang L, Luo GB, Yang J (2014) Nonlinear electro-dynamic analysis of micro-actuators: effect of material nonlinearity. Appl Math Model 38:2781–2790
5. Bu L, Arroyo E, Seshia AA (2021) Frequency combs: a new mechanism for MEMS vibration energy harvesters. In: 21st international conference on solid-state sensors, actuators and microsystems (Transducers), pp 136–139
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