Mode Coupling and Nonlinear Resonances of MEMS Arch Resonators for Bandpass Filters
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/srep41820.pdf
Reference44 articles.
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3. Bifano, T. Adaptive imaging: MEMS deformable mirrors. Nature photonics 5, 21–23 (2011).
4. Chaste, J. et al. A nanomechanical mass sensor with yoctogram resolution. Nature nanotechnology 7, 301–304 (2012).
5. Meier, D. C., Semancik, S., Button, B., Strelcov, E. & Kolmakov, A. Coupling nanowire chemiresistors with MEMS microhotplate gas sensing platforms. Applied Physics Letters 91, 063118 (2007).
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