Molecular dynamics simulation of the scratching process of GaAs with different crystal orientations

Author:

Huang Hao,Jiang Chen,Gao Rui,Jiang Jinxin

Publisher

Springer Science and Business Media LLC

Reference27 articles.

1. Wu L, Yu J, Fan T et al (2020) Effects of normal load and etching time on current evolution of scratched GaAs surface during selective etching. Mater Sci Semicond Process 105:104744

2. Gao R, Jiang C, Lang H et al (2021) Experimental investigation of influence of scratch features on GaAs cleavage plane during cleavage processing using a scratching capability index. Int J Prec Eng Manuf Technol 8:761–770

3. Zhang JJ, Zhang JG, Wang ZF, Hartmaier A, Yan YD, Sun T (2017) Interaction between phase transformations and dislocations at incipient plasticity of monocrystalline silicon under nanoindentation. Comput Mater Sci 131:55–61

4. Shi J, Shi Y, Liu CR (2010) Evaluation of three dimensional single point turning at atomistic level by molecular dynamics simulation. Int J Adv Manuf Technol 8:161–171

5. Zhu PZ, Hu YZ, Ma TB et al (2011) Molecular dynamics study on friction due to ploughing and adhesion in nanometric scratching process. Tribol Lett 41:41–46

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