Author:
Yun Kwang-Seok,Yoon Euisik
Publisher
Springer Science and Business Media LLC
Subject
Biomedical Engineering,Applied Microbiology and Biotechnology,Bioengineering,Biotechnology
Reference17 articles.
1. Linnemann, R., P. Woias, C.-D. Senfft, and J. A. Ditterich (1998) A self-priming and bubble-tolerant piezoelectric silicon micropump for liquid and gases.Proceedings of 11th IEEE MEMS ’98. pp. 532–537. Heidelberg, Germany.
2. Zengerle, R., S. Kluge, M. Richter, and A. Richter (1995) A bidirectional silicon micropump.Proceedings of IEEE MEMS ’95. pp. 19–24. Amsterdam, The Netherlands.
3. Van De Pol, F. C. M., H. T. G. Van Lintel, M. Elwenspoek and J. H. J. Fluitman (1990) A thermo-pneumatic micropump based on micro-engineering techniques.Sens. Actuators A 21–23: 198–202.
4. Zhang, W. and C. H. Ahn (1996) A bidirectional magnetic micropump on a silicon wafer.Proceedings of IEEE Solid-State Sensor and Actuator Workshop. pp. 94–97. South Carolina, USA.
5. Yang, Y. Z. Zhou, X. Ye, and X. Jiang (1996) A bimetallic thermally actuated micropump.DSC-Vol. 59, Microelectromechanical Systems (MEMS), ASME, pp. 351–354.
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