1. Fedder GK, Mukherjee T (1996) Physical design for surface-micromachined MEMS. In: Proceedings of the 5th ACM/SIGDA physical design workshop, Reston, VA, USA, April 15–17, pp 53–60
2. Esashi M, Sugiyama S, Ikeda K, Wang Y, Myashita H (1998) Vacuum-sealed silicon micromachined pressure sensors. Proc IEEE 86(8): 1627–1639
3. Zhang Z-H, Zhang Y-H, Liu L-T, Ren T-L (2008) A novel MEMS pressure sensor with MOSFET on chip. IEEE Sens:1564–1567
4. Ongkodjojo A, Tay FEH (2002) Global optimization and design for microelectromechanical systems devices based on simulated annealing. J Micromech Microeng 12: 878–897
5. Isoda T, Ishida Y (2006) Seperation of cells using fluidic MEMS device and a quantitative analysis of cell movement. Trans Inst Electr Eng Jpn 126(11): 583–589