Evolutionary design optimization of MEMS: a review of its history and state-of-the-art

Author:

Wang Pan,Lu Qibing,Fan Zhun

Funder

National Natural Science Foundation of China

State Key Laboratory of Space Medicine Fundamentals and Application, China Astronaut Research and Training Center

Publisher

Springer Science and Business Media LLC

Subject

Computer Networks and Communications,Software

Reference59 articles.

1. Uhlmann, E., Laghmouchi, A., Ehrenpfordt, R., Hohwieler, E., Geisert, C.: Intelligent electronic system for condition monitoring in Industrie 4.0—micro electromechanical electronic system for condition, process and system monitoring. Zeitschrift fuer Wirtschaftlichen Fabrikbetrieb 111(12), 855–857 (2016)

2. Zhou, N., Zhu, B., Agogino, A.M., Pister, K.S.J.: Evolutionary synthesis of MEMS MicroElectronicMechanical systems design. In: Intelligent Engineering System through Artificial Neural Networks Artificial Neural Networks in Engineering (ANNIE2001), vol. 11 (ASME Press, New York, 2001), pp. 197–202

3. Kamalian, R., Zhou, N., Agogino, A. M.: A comparison of MEMS synthesis techniques. In: Proceedings of Pacific Rim Workshop on Transducers & Micro/nano Technologies, pp. 22–24 (2002)

4. Zhou, N., Agogino, A. M., Pister, K. S. J.: Automated design synthesis for micro-electro-mechanical systems (MEMS). In: Proceedings of the ASME Design Engineering Technical Conference, pp. 68–73 (2002)

5. Zhang, Y., Agogino, A.M.: Hierarchical component-based representations for evolving microelectromechanical systems designs. Artif. Intell. Eng. Des. Anal. Manuf. 25(1), 41–55 (2011)

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