Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process

Author:

Lee Ki Bum,Kim Chang OukORCID

Funder

National Research Foundation of Korea

Publisher

Springer Science and Business Media LLC

Subject

Artificial Intelligence,Industrial and Manufacturing Engineering,Software

Reference40 articles.

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2. Bengio, Y. (2009). Learning deep architectures for AI. Foundations and Trends® in Machine Learning,2(1), 1–127. https://doi.org/10.1561/2200000006 .

3. García, V., Sánchez, J. S., Rodríguez-Picón, L. A., Méndez-González, L. C., & de Jesús Ochoa-Domínguez, H. (2018). Using regression models for predicting the product quality in a tubing extrusion process. Journal of Intelligent Manufacturing. https://doi.org/10.1007/s10845-018-1418-7 .

4. Goodfellow, I., Pouget-Abadie, J., Mirza, M., Xu, B., Warde-Farley, D., Ozair, S., Courville, A., & Bengio, Y. (2014). Generative adversarial nets. In Proceedings of neural information processing systems (pp. 2672–2680).

5. Graves, A. (2013). Generating sequences with recurrent neural networks. arXiv preprint arXiv:1308.0850 .

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