1. See, e.g., J.W.Mayer, L.Eriksson, J.A.Davies:Ion Implantation in Semiconductors (Academic Press, New York 1970)
2. J.W.Mayer, L.Eriksson, S.T.Picraux, J.A.Davies: Can. J. Phys.46, 663 (1968)
3. B.Svenningsen, A.Johansen, L.T.Chadderton, J.L.Whitton: The Application of Ion Beams to Materials (Inst. Phys. Conf. Ser. No. 28, 1976), p. 142
4. H.Muller, W.K.Chu, J.Gyulai, J.W.Mayer, T.W.Sigmon, T.R.Can: Appl. Phys. Lett.26, 292 (1975)
5. W.K.Chu, H.Muller, J.W.Mayer, T.W.Sigmon: InIon Implantation in Semiconductors, ed. by S. Namba (Plenum Press, New York 1975)