Sensor diaphragm under initial tension: Linear analysis
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Aerospace Engineering
Link
http://link.springer.com/content/pdf/10.1007/BF02428184.pdf
Reference10 articles.
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2. Pedersen, M., Meijerink, M.G.H., Olthuis, W., andBergveld, P., “A Capacitive Differential Pressure Sensor with Polyimide Diaphragm,”Journal of Micromechanics and Microengineering,7,250–252 (1997).
3. Xiao, Z., Engström, O., andVidovic, N., “Diaphragm Deflection of Silicon Interferometer Structures Used as Pressure Sensors,”Sensors and Actuators A,58,99–107 (1997).
4. Zeng, N., Shi, C., Wang, D., Zhang, M., andLiao, Y., “Diaphragm-type Fiber-optic Interferometric Acoustic Sensor,”Optical Engineering,42, (9),2558–2562 (2003).
5. Ph.D. Dissertation;M. Yu,2002
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