Author:
Jin Zhong,Li Xiang,He Feng,Liu Fangting,Li Jinyu,Li Junhui
Abstract
Purpose
The performance of oil-filled pressure cores is very much affected by the corrugated diaphragm and the oil filling volume. The purpose of this paper is to show the effects of different corrugated diaphragms, different oil filling volumes and different treatments of the corrugated diaphragms on the performance of pressure sensors.
Design/methodology/approach
Pressure-sensitive cores with different diaphragm diameters, different diaphragm ripple numbers and different oil filling volumes are produced, and thermal cycling is introduced to improve the diaphragm performance, and finally the performance of each pressure-sensitive core is tested and the test data are analyzed and compared.
Findings
The experimental results show that the larger the diameter of the corrugated diaphragm used for encapsulation, the better the performance. For pressure-sensitive cores using smaller diameter corrugated diaphragms, the performance of one corrugation is better than that of two corrugations. When the number of corrugations and the diameter are the same size, the performance of the outer ring of the diaphragm with concave corrugations is better than that with convex corrugations. At the same time, the diaphragm after thermal cycling treatment and appropriate reduction of encapsulated oil filling can improve the performance of the pressure-sensitive core.
Originality/value
By exploring the effects of corrugated diaphragm and oil filling volume on the performance of oil-filled pressure cores, the design of oil-filled pressure sensors can be guided to improve sensor performance.
Reference21 articles.
1. Construction and characterization of the stainless steel isolated type semiconductor pressure sensor;Journal of Sensor Science and Technology,2002
2. Study on the oil-filled isolated pressure sensor by a fluid-solid coupling method,2015
3. Stress, sensitivity and frequency analysis of the corrugated diaphragm for different corrugation structures;Smart Structures and Systems,2021
4. Design and optimization of piezoresistive MEMS pressure sensors using ABAQUS,2014
5. An overview on the modeling of silicon piezoresistive pressure microsensors,2012