Optimization of the Deposition Process Parameters of DC Magnetron Sputtering to Achieve Desired Deposition Rate Using Design of Experiment Method
Author:
Funder
Ministry of Education, India
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s11664-023-10628-y.pdf
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4. T. Hasselmann, B. Misimi, N. Boysen, D. Zanders, J.L. Wree, D. Rogalla, and T. Riedl, Silver thin-film electrodes grown by low-temperature plasma-enhanced spatial atomic layer deposition at atmospheric pressure. Adv. Mater. Technol. 8(1), 2200796 (2023).
5. A. Antonaia, M.L. Addonizio, S. Esposito, M. Ferrara, A. Castaldo, A. Guglielmo, and A. D’Angelo, Adhesion and structural stability enhancement for Ag layers deposited on steel in selective solar coatings technology. Surf. Coat. Technol. 255, 96 (2014).
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